Optically transparent, flexible pressure sensor array micromachined utilizing plasma assisted bonding

John Yan

doi:10.1117/12.899493

6 February 2012 Optically transparent, flexible pressure sensor array micromachined utilizing plasma assisted bonding

John Yan

Proceedings Volume 8248, Micromachining and Microfabrication Process Technology XVII; 824803 (2012) https://doi.org/10.1117/12.899493
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

This paper aims to describe the device operation, microfabrication and measurement results of an array of optically transparent, pressure sensors which exhibit high capacitance-to-pressure sensitivity and reliable operation.

Citation Download Citation

John Yan "Optically transparent, flexible pressure sensor array micromachined utilizing plasma assisted bonding", Proc. SPIE 8248, Micromachining and Microfabrication Process Technology XVII, 824803 (6 February 2012); https://doi.org/10.1117/12.899493

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