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6 February 2012 Optically transparent, flexible pressure sensor array micromachined utilizing plasma assisted bonding
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Abstract
This paper aims to describe the device operation, microfabrication and measurement results of an array of optically transparent, pressure sensors which exhibit high capacitance-to-pressure sensitivity and reliable operation.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
John Yan "Optically transparent, flexible pressure sensor array micromachined utilizing plasma assisted bonding", Proc. SPIE 8248, Micromachining and Microfabrication Process Technology XVII, 824803 (6 February 2012); https://doi.org/10.1117/12.899493
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