High precision fabrication of polarization insensitive resonant grating filters

R. R. Boye; D. W. Peters; J. R. Wendt; S. Samora; J. Stevens; R. J. Shul; J. Hunker; R. A. Kellogg; S. A. Kemme

doi:10.1117/12.912169

8 February 2012 High precision fabrication of polarization insensitive resonant grating filters

R. R. Boye, D. W. Peters, J. R. Wendt, S. Samora, J. Stevens, R. J. Shul, J. Hunker, R. A. Kellogg, S. A. Kemme

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 82490C (2012) https://doi.org/10.1117/12.912169
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Resonant subwavelength gratings have been designed and fabricated as wavelength-specific reflectors for application as a rotary position encoder utilizing ebeam based photolithography. The first grating design used a two-dimensional layout to provide polarization insensitivity with separate layers for the grating and waveguide. The resulting devices had excellent pattern fidelity and the resonance peaks and widths closely matched the expected results. Unfortunately, the gratings were particularly angle sensitive and etch depth errors led to shifts in the center wavelength of the resonances. A second design iteration resulted in a double grating period to reduce the angle sensitivity as well as different materials and geometry; the grating and waveguide being the same layer. The inclusion of etch stop layers provided more accurate etch depths; however, the tolerance to changes in the grating duty cycle was much tighter. Results from these devices show the effects of small errors in the pattern fidelity. The fabrication process flows for both iterations of devices will be reviewed as well as the performance of the fabricated devices. A discussion of the relative merits of the various design choices provides insight into the importance of fabrication considerations during the design stage.

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R. R. Boye, D. W. Peters, J. R. Wendt, S. Samora, J. Stevens, R. J. Shul, J. Hunker, R. A. Kellogg, and S. A. Kemme "High precision fabrication of polarization insensitive resonant grating filters", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490C (8 February 2012); https://doi.org/10.1117/12.912169

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KEYWORDS

Etching

Computer programming

Waveguides

Optical design

Silicon

Titanium dioxide

Semiconducting wafers

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