Fabrication of optically monolithic, low-index guided mode resonance filters

Aaron J. Pung; Menelaos K Poutous; Raymond C. Rumpf; Zachary A. Roth; Eric G. Johnson

doi:10.1117/12.908582

8 February 2012 Fabrication of optically monolithic, low-index guided mode resonance filters

Aaron J. Pung, Menelaos K Poutous, Raymond C. Rumpf, Zachary A. Roth, Eric G. Johnson

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 82490F (2012) https://doi.org/10.1117/12.908582
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

This paper presents a narrow spectral filter based on a monolithic material system. Guided-mode resonance is achieved by embedding a periodic array of air holes within a similar-index material. Microvoids created in the lowindex substrate during deposition of the waveguide give a relatively high index contrast for guided-mode resonance. One and two-dimensional gratings are used to examine polarization dependence of the device. Theoretical and experimental results are provided, demonstrating a roughly six nanometer resonance at the full width half-maximum for both geometries.

Citation Download Citation

Aaron J. Pung, Menelaos K Poutous, Raymond C. Rumpf, Zachary A. Roth, and Eric G. Johnson "Fabrication of optically monolithic, low-index guided mode resonance filters", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490F (8 February 2012); https://doi.org/10.1117/12.908582

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