8 February 2012 3D microstructures fabricated by prism-assisted inclined UV lithography
Author Affiliations +
Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 82490L (2012); doi: 10.1117/12.908191
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
Three-dimensional (3D) microstructures are fabricated by prism-assisted inclined ultraviolet (UV) lithography. The exposure angles of slanted structures ranging from 0° to 65° in SU-8 photoresist can be easily achieved without immersion in index matching liquid. The sample surface reflection of UV light can be utilized for the fabrication of symmetric structures. Tripod structures have been fabricated by one-step UV exposure with corner prism. Examples of various achievable 3D microstructures are presented.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guomin Jiang, Sarfaraz Baig, Michael R. Wang, "3D microstructures fabricated by prism-assisted inclined UV lithography", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490L (8 February 2012); doi: 10.1117/12.908191; https://doi.org/10.1117/12.908191
PROCEEDINGS
7 PAGES


SHARE
KEYWORDS
Ultraviolet radiation

Prisms

Lithography

3D microstructuring

Liquids

Photoresist materials

Fabrication

Back to Top