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8 February 2012 3D microstructures fabricated by prism-assisted inclined UV lithography
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Three-dimensional (3D) microstructures are fabricated by prism-assisted inclined ultraviolet (UV) lithography. The exposure angles of slanted structures ranging from 0° to 65° in SU-8 photoresist can be easily achieved without immersion in index matching liquid. The sample surface reflection of UV light can be utilized for the fabrication of symmetric structures. Tripod structures have been fabricated by one-step UV exposure with corner prism. Examples of various achievable 3D microstructures are presented.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Guomin Jiang, Sarfaraz Baig, and Michael R. Wang "3D microstructures fabricated by prism-assisted inclined UV lithography", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490L (8 February 2012);

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