Active and adaptive optical methods for rapid fabrication of 3D photonic structures

Patrick Salter; Richard Simmonds; Martin J. Booth

doi:10.1117/12.909836

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14 February 2012 Active and adaptive optical methods for rapid fabrication of 3D photonic structures

Patrick Salter, Richard Simmonds, Martin J. Booth

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Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 82490M (2012) https://doi.org/10.1117/12.909836
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

We outline recent research into the application of adaptive optical techniques to the laser fabrication of threedimensional structures with sub-micrometer precision. Aberration correction can be implemented using deformable mirrors or liquid crystal spatial light modulators (LCSLMs). The correction ensures that the quality of the laser focus is maintained when focussing at depth into a material with high refractive index. Flexible parallel fabrication methods have been implemented using a LCSLM through both holographic beam shaping and an addressable microlens array. Applications have been shown in a range of high index materials, including diamond, lithium niobate and glasses.

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Patrick Salter, Richard Simmonds, and Martin J. Booth "Active and adaptive optical methods for rapid fabrication of 3D photonic structures", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490M (14 February 2012); https://doi.org/10.1117/12.909836

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