Fabrication of eight-channel array single-mode waveguides via vacuum assisted microfluidics

Sarfaraz Baig; Guomin Jiang; Qunhui Sun; Michael R. Wang

doi:10.1117/12.908136

14 February 2012 Fabrication of eight-channel array single-mode waveguides via vacuum assisted microfluidics

Sarfaraz Baig, Guomin Jiang, Qunhui Sun, Michael R. Wang

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 82490P (2012) https://doi.org/10.1117/12.908136
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

We report on the fabrication of an eight-channel single-mode waveguide array via vacuum assisted microfluidic soft lithographic technique. The incorporation of sectional flow tapers perpendicular to the waveguide direction allows for the realization of long single-mode channel waveguide arrays, thus overcoming the waveguide length limitation set by the viscosity of the UV curable resin. The refractive index and other properties of the synthesized UV curable core waveguide resin can be tuned through the reformulation of material composition.

Citation Download Citation

Sarfaraz Baig, Guomin Jiang, Qunhui Sun, and Michael R. Wang "Fabrication of eight-channel array single-mode waveguides via vacuum assisted microfluidics", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490P (14 February 2012); https://doi.org/10.1117/12.908136

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available