14 February 2012 Fabrication of eight-channel array single-mode waveguides via vacuum assisted microfluidics
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Abstract
We report on the fabrication of an eight-channel single-mode waveguide array via vacuum assisted microfluidic soft lithographic technique. The incorporation of sectional flow tapers perpendicular to the waveguide direction allows for the realization of long single-mode channel waveguide arrays, thus overcoming the waveguide length limitation set by the viscosity of the UV curable resin. The refractive index and other properties of the synthesized UV curable core waveguide resin can be tuned through the reformulation of material composition.
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Sarfaraz Baig, Sarfaraz Baig, Guomin Jiang, Guomin Jiang, Qunhui Sun, Qunhui Sun, Michael R. Wang, Michael R. Wang, } "Fabrication of eight-channel array single-mode waveguides via vacuum assisted microfluidics", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490P (14 February 2012); doi: 10.1117/12.908136; https://doi.org/10.1117/12.908136
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