High precision geometrical characterization and alignment of miniaturized optics

Patrik Langehanenberg; Josef Heinisch; Eugen Dumitrescu

doi:10.1117/12.908727

14 February 2012 High precision geometrical characterization and alignment of miniaturized optics

Patrik Langehanenberg, Josef Heinisch, Eugen Dumitrescu

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 82490U (2012) https://doi.org/10.1117/12.908727
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Miniaturized optical systems like endoscopy or cell phone lenses systems comprise several optical elements like lenses, doublets and plane optics. To receive a good imaging quality the distances and angles between the different optical elements have to be as accurate as possible. In the first step we will describe how the distances and angles between different elements can be monitored and finally we will describe a technique to actively align small optics (diameter approx. 1mm and smaller) with respect to each other. For the measurement electronic autocollimators combined with white-light-interferometers are used. The electronic autocollimator reveals the exact centration errors between optical elements and the low coherence interferometer reveals the distances between surfaces. The accuracy of the centration error measurement is in the range of 0.1μm and the accuracy of the distance measurement is 1μm. Both methods can be applied to assembled multi-element optics. That means geometrical positions of all single surfaces of the final optical system can be analysed without loss of information. Both measurement techniques complement one another. Once the exact x,y,z - Position of each optical surface and element is known computer controlled actuators will be used to improve the alignment of the optics. For this purpose we use piezo-electric-actuators. This method had been applied to cement e.g. doublets for endoscope optics. In this case the optical axis of one lens has been aligned with respect to the optical axis of a second reference lens. Traditional techniques usually rely on an uncertain mechanical reference.

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Patrik Langehanenberg, Josef Heinisch, and Eugen Dumitrescu "High precision geometrical characterization and alignment of miniaturized optics", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 82490U (14 February 2012); https://doi.org/10.1117/12.908727

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KEYWORDS

Lenses

Autocollimators

Distance measurement

Optical components

Optical alignment

Interferometers

Geometrical optics

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