Optical microcavities fabricated using direct proton beam writing

Sudheer Kumar Vanga; Shuvan Prashant Turaga; Ee Jin Teo; Andrew Bettiol

doi:10.1117/12.908319

14 February 2012 Optical microcavities fabricated using direct proton beam writing

Sudheer Kumar Vanga, Shuvan Prashant Turaga, Ee Jin Teo, Andrew Bettiol

Proceedings Volume 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V; 824918 (2012) https://doi.org/10.1117/12.908319
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Proton beam writing (PBW) is a high-resolution direct write lithographic technique suitable for the fabrication of micro/nano optical components with smooth vertical sidewalls. In the present work PBW was used to fabricate smooth micro cavities in negative tone photoresist SU-8 and Rhodamine B doped SU-8. Two different laser cavities based on whispering gallery mode resonators were fabricated using PBW. The laser cavities in Rhodamine B doped SU-8 resist were optically pumped with a pulsed frequency doubled Nd: YAG laser, and emits light in the chip plane at 643 nm. The presented laser cavities showed pump threshold as low as 3 μJ/mm², which is the lowest threshold reported in planar cavities fabricated in Rhodamine B dye based polymer laser cavities.

Citation Download Citation

Sudheer Kumar Vanga, Shuvan Prashant Turaga, Ee Jin Teo, and Andrew Bettiol "Optical microcavities fabricated using direct proton beam writing", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 824918 (14 February 2012); https://doi.org/10.1117/12.908319

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