14 February 2012 Optical microcavities fabricated using direct proton beam writing
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Proton beam writing (PBW) is a high-resolution direct write lithographic technique suitable for the fabrication of micro/nano optical components with smooth vertical sidewalls. In the present work PBW was used to fabricate smooth micro cavities in negative tone photoresist SU-8 and Rhodamine B doped SU-8. Two different laser cavities based on whispering gallery mode resonators were fabricated using PBW. The laser cavities in Rhodamine B doped SU-8 resist were optically pumped with a pulsed frequency doubled Nd: YAG laser, and emits light in the chip plane at 643 nm. The presented laser cavities showed pump threshold as low as 3 μJ/mm2, which is the lowest threshold reported in planar cavities fabricated in Rhodamine B dye based polymer laser cavities.
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Sudheer Kumar Vanga, Shuvan Prashant Turaga, Ee Jin Teo, Andrew Bettiol, "Optical microcavities fabricated using direct proton beam writing", Proc. SPIE 8249, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics V, 824918 (14 February 2012); doi: 10.1117/12.908319; https://doi.org/10.1117/12.908319


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