15 February 2012 Characterization of a nanocoating using a MEMS tribogauge
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Abstract
A chemisorbed fluorocarbon self-assembled monolayer (FSAM) layer on MEMS surfaces can greatly improve MEMS device reliability by reducing the in-use stiction force. In this work, a MEMS tribogauge that measures stiction force between two interacting surfaces has been used for FSAM coating and process parameter characterization. A commercially available nanocoating tool was used for depositing FSAM coatings. Five different coating recipes with different injection times for the FSAM precursor were evaluated with the tribogauge. The interacting surfaces of the tribogauge were exposed to many load cycles. These experiments allowed a preferred process to be determined.
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Ashwin Vijayasai, Ashwin Vijayasai, Gautham Ramachandran, Gautham Ramachandran, Ganapathy Sivakumar, Ganapathy Sivakumar, Charlie Anderson, Charlie Anderson, Richard Gale, Richard Gale, Tim Dallas, Tim Dallas, } "Characterization of a nanocoating using a MEMS tribogauge", Proc. SPIE 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, 82500C (15 February 2012); doi: 10.1117/12.909335; https://doi.org/10.1117/12.909335
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