15 February 2012 MEMS technology for miniaturized space systems: needs, status, and perspectives
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Abstract
Future applications of miniaturized space systems will have special needs on MEMS components. This paper addresses the needs, status and perspectives of the MEMS technology for miniaturized space system from the perspective of a spacecraft developer. First, the needs of future space missions on MEMS components are discussed. Then, the state-of-the- art MEMS technologies are reviewed based upon these needs. Finally, perspectives of space-based MEMS technology will be addressed based on the analysis of both future mission needs and technological trends.
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E. Gill, E. Gill, J. Guo, J. Guo, } "MEMS technology for miniaturized space systems: needs, status, and perspectives", Proc. SPIE 8250, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI, 82500I (15 February 2012); doi: 10.1117/12.907450; https://doi.org/10.1117/12.907450
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