Translator Disclaimer
14 February 2012 Design and analysis of a micromachined gyroscope
Author Affiliations +
Abstract
This paper describes the simulation and design of a MEMS thermal gyroscope and optimizing the design for increased sensitivity through the use of the Comsol Multiphysics software package. Two different designs are described, and the effects of working fluid properties are explored. A prototype of this device has been fabricated using techniques for rapid prototyping of MEMS transducers.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nilgoon Zarei, Albert Leung, and John D. Jones "Design and analysis of a micromachined gyroscope", Proc. SPIE 8251, Microfluidics, BioMEMS, and Medical Microsystems X, 82510X (14 February 2012); https://doi.org/10.1117/12.909171
PROCEEDINGS
6 PAGES


SHARE
Advertisement
Advertisement
RELATED CONTENT

MEMS-IDT-based microaccelerometers and gyroscopes
Proceedings of SPIE (September 28 1999)
Expanding the spacecraft application base with MEMS gyros
Proceedings of SPIE (February 17 2011)
MEMS in Singapore
Proceedings of SPIE (March 15 2001)

Back to Top