CONFERENCE PROCEEDINGS
Advanced Search >
Home > Proceedings > Volume 8251 > Article
Translator Disclaimer
14 February 2012 Design and analysis of a micromachined gyroscope
Nilgoon Zarei; Albert Leung; John D. Jones
Author Affiliations +
Proceedings Volume 8251, Microfluidics, BioMEMS, and Medical Microsystems X; 82510X (2012) https://doi.org/10.1117/12.909171
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
This paper describes the simulation and design of a MEMS thermal gyroscope and optimizing the design for increased sensitivity through the use of the Comsol Multiphysics software package. Two different designs are described, and the effects of working fluid properties are explored. A prototype of this device has been fabricated using techniques for rapid prototyping of MEMS transducers.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Nilgoon Zarei, Albert Leung, and John D. Jones "Design and analysis of a micromachined gyroscope", Proc. SPIE 8251, Microfluidics, BioMEMS, and Medical Microsystems X, 82510X (14 February 2012); https://doi.org/10.1117/12.909171
ACCESS THE FULL ARTICLE
PERSONAL SIGN IN
Full access may be available with your subscription
 
Forgot your username?
Forgot your password?
No SPIE account? Create an account
Institutional Access:
Sign in with your institutional credentials
PURCHASE THIS CONTENT
INTERESTED IN A FREE CORPORATE TRIAL?
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 6 PAGES
DOWNLOAD PDF SAVE TO MY LIBRARY
SHARE
GET CITATION
< Previous Article
|
Next Article >
Advertisement
Advertisement
KEYWORDS
RELATED CONTENT
Towards rapid prototyped convective microfluidic DNA amplification platform
Proceedings of SPIE (March 22 2017)
MEMS-IDT-based microaccelerometers and gyroscopes
Proceedings of SPIE (September 28 1999)
Novel self-oscillating anemometer with capacitance-based sensing
Proceedings of SPIE (October 19 2000)
Rapid prototyping of multi-level polydimethylsiloxane-based microfluidic devices
Proceedings of SPIE (December 29 2008)
Expanding the spacecraft application base with MEMS gyros
Proceedings of SPIE (February 17 2011)
MEMS and nanotechnology research for the electronics industry
Proceedings of SPIE (August 15 2001)
MEMS in Singapore
Proceedings of SPIE (March 15 2001)
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top