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Trajectory precision of micromachined scanning mirrors for laser beam scanning pico-projector displays
Laser projector solution based on two 1D resonant scanning micromirrors assembled in a low vertical distortion scan head
Large MEMS-based programmable reflective slit mask for multi-object spectroscopy fabricated using multiple wafer-level bonding
Advances in performance and miniaturization of a FT-IR spectrometer system based on a large stroke MOEMS piston mirror
Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings
Modeling and simulation of the surface profile forming process for optimum control of the lithographically fabricated microlenses and lens arrays
Fabrication and characterization of wavelength selective microbolometers using a planar self-aligned process for low deformation membranes