One-dimensional light modulator

S. Sinning; I. Wullinger; J.-U. Schmidt; M. Friedrichs; U. Dauderstädt; S. Wolschke; T. Hughes; D. Pahner; M. Wagner

doi:10.1117/12.906651

15 February 2012 One-dimensional light modulator

S. Sinning, I. Wullinger, J.-U. Schmidt, M. Friedrichs, U. Dauderstädt, S. Wolschke, T. Hughes, D. Pahner, M. Wagner

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520H (2012) https://doi.org/10.1117/12.906651
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

Facing the recent developments in the area of (quasi) continuous wave lasers towards higher power the Fraunhofer IPMS introduces a novel light modulator incorporating an innovative architecture optimized for high laser power applications requiring a fast device. As a novelty each pixel is composed of a number of micro mirrors, aligned in a row. That approach allows for, in principle, very long pixels with uniform surface properties. This concept in turn results in reduction of power density at the light modulator surface and hence opens the way to high power applications allowing power densities in the range of several ten W/cm² at the light modulator surface. Each pixel can be switched to black, white or even arbitrary gray values with very high speed. This paper summarizes the device design, working concept, mechanical properties for both static and dynamic operation, and surface properties. Application relevant subjects as stability under intense laser illumination complete the discussion.

Citation Download Citation

S. Sinning, I. Wullinger, J.-U. Schmidt, M. Friedrichs, U. Dauderstädt, S. Wolschke, T. Hughes, D. Pahner, and M. Wagner "One-dimensional light modulator", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520H (15 February 2012); https://doi.org/10.1117/12.906651

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KEYWORDS

Mirrors

Modulators

Micromirrors

Electrodes

Laser applications

Continuous wave operation

Reflectivity

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