15 February 2012 One-dimensional light modulator
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Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520H (2012) https://doi.org/10.1117/12.906651
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Facing the recent developments in the area of (quasi) continuous wave lasers towards higher power the Fraunhofer IPMS introduces a novel light modulator incorporating an innovative architecture optimized for high laser power applications requiring a fast device. As a novelty each pixel is composed of a number of micro mirrors, aligned in a row. That approach allows for, in principle, very long pixels with uniform surface properties. This concept in turn results in reduction of power density at the light modulator surface and hence opens the way to high power applications allowing power densities in the range of several ten W/cm2 at the light modulator surface. Each pixel can be switched to black, white or even arbitrary gray values with very high speed. This paper summarizes the device design, working concept, mechanical properties for both static and dynamic operation, and surface properties. Application relevant subjects as stability under intense laser illumination complete the discussion.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. Sinning, I. Wullinger, J.-U. Schmidt, M. Friedrichs, U. Dauderstädt, S. Wolschke, T. Hughes, D. Pahner, and M. Wagner "One-dimensional light modulator", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520H (15 February 2012); doi: 10.1117/12.906651; https://doi.org/10.1117/12.906651

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