16 February 2012 Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings
Author Affiliations +
Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520J (2012) https://doi.org/10.1117/12.906631
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
A novel technology is presented for arrays of vertical flaps as optically modulating elements which are actuated electrostatically to horizontal position at low voltages of 30-50V. One application is a reflective display exhibiting a contrast ratio of 1:95. We will also show a) shutters for transmissive devices in an array configuration and b) switchable gratings. A large variety of flap geometries are fabricated such as flat reflective, grating, lens or grid shape. Poly-Si refill of thin high aspect-ratio trenches followed of dry etching of the surrounding material is used to fabricate the flaps suspended by torsion beams.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Jutzi, F. Jutzi, W. Noell, W. Noell, N. F. de Rooij, N. F. de Rooij, } "Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520J (16 February 2012); doi: 10.1117/12.906631; https://doi.org/10.1117/12.906631
PROCEEDINGS
10 PAGES


SHARE
Back to Top