Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings

F. Jutzi; W. Noell; N. F. de Rooij

doi:10.1117/12.906631

16 February 2012 Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings

F. Jutzi, W. Noell, N. F. de Rooij

Author Affiliations +

Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520J (2012) https://doi.org/10.1117/12.906631
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

A novel technology is presented for arrays of vertical flaps as optically modulating elements which are actuated electrostatically to horizontal position at low voltages of 30-50V. One application is a reflective display exhibiting a contrast ratio of 1:95. We will also show a) shutters for transmissive devices in an array configuration and b) switchable gratings. A large variety of flap geometries are fabricated such as flat reflective, grating, lens or grid shape. Poly-Si refill of thin high aspect-ratio trenches followed of dry etching of the surrounding material is used to fabricate the flaps suspended by torsion beams.

Citation Download Citation

F. Jutzi, F. Jutzi, W. Noell, W. Noell, N. F. de Rooij, N. F. de Rooij, } "Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520J (16 February 2012); doi: 10.1117/12.906631; https://doi.org/10.1117/12.906631

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years