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16 February 2012 Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings
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Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520J (2012) https://doi.org/10.1117/12.906631
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
A novel technology is presented for arrays of vertical flaps as optically modulating elements which are actuated electrostatically to horizontal position at low voltages of 30-50V. One application is a reflective display exhibiting a contrast ratio of 1:95. We will also show a) shutters for transmissive devices in an array configuration and b) switchable gratings. A large variety of flap geometries are fabricated such as flat reflective, grating, lens or grid shape. Poly-Si refill of thin high aspect-ratio trenches followed of dry etching of the surrounding material is used to fabricate the flaps suspended by torsion beams.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
F. Jutzi, W. Noell, and N. F. de Rooij "Low voltage vertical flaps arrays as optical modulating elements for reflective display and switchable gratings", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520J (16 February 2012); https://doi.org/10.1117/12.906631
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