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15 February 2012 Dynamically deformable reflective membrane for laser beam shaping and smoothing
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Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520K (2012) https://doi.org/10.1117/12.909092
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
We show a laser beam shaping device made of a deformable continuous reflective membrane fabricated over a scanning stage. The combination of two actuator schemes enables shaping and smoothing of a laser beam with a unique compact device. It is designed to shape an input laser beam into a flat top or Gaussian intensity profile, to support high optical load and to potentially reduce speckle contrast. One single electrode is needed to deform the whole membrane into multiple sub-reflecting concave elements. The scanning stage is used simultaneously to smooth out the remaining interference patterns. The fabrication process is based on SOI wafer and parylene refilling to enable the fabrication of a 100 % fill factor 5 by 5 mm2 deformable membrane. Applications for such device are laser machining and laser display.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Masson, R. Bitterli, A. Bich, W. Noell, R. Voelkel, K. Weible, and N. de Rooij "Dynamically deformable reflective membrane for laser beam shaping and smoothing", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520K (15 February 2012); https://doi.org/10.1117/12.909092
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