15 February 2012 Thin varifocal liquid lenses actuated below 10V for mobile phone cameras
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Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520P (2012) https://doi.org/10.1117/12.908057
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
This paper describes the Wavelens technology: a new type of varifocal liquid lenses actuated by electrostatic parallel plates. The main technological steps involved in the fabrication process are discussed and the influences of the membrane material, the electrode size and composition (rigidity and stress) on the optical performance are evaluated in detail. The varifocal lenses were characterized extensively using wave-front measurements. Optical powers of 11m-1 at 9V (16m-1 at 10V) are measured on lenses with optical diameters of 3mm. The influence of the electrode size on the optical power is analyzed giving basic design rules for the device performance optimization. No significant optical quality degradation was observed with a low wave front error (<0.15μm) measured on the varifocal lenses.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arnaud Pouydebasque, Arnaud Pouydebasque, Sébastien Bolis, Sébastien Bolis, Fabrice Jacquet, Fabrice Jacquet, Claudine Bridoux, Claudine Bridoux, Laëtitia Zavattoni, Laëtitia Zavattoni, Sofiane Soulimane, Sofiane Soulimane, Stéphane Moreau, Stéphane Moreau, Damien Saint-Patrice, Damien Saint-Patrice, Christophe Bouvier, Christophe Bouvier, Christophe Kopp, Christophe Kopp, Stéphane Fanget, Stéphane Fanget, } "Thin varifocal liquid lenses actuated below 10V for mobile phone cameras", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520P (15 February 2012); doi: 10.1117/12.908057; https://doi.org/10.1117/12.908057


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