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15 February 2012 Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications
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Proceedings Volume 8252, MOEMS and Miniaturized Systems XI; 82520U (2012) https://doi.org/10.1117/12.906690
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
Abstract
This paper describes in detail our concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical comb configuration is realized from a planar scanner substrate by wafer bonding. The device concept is highly flexible by design; different kinds of vertical combs (e.g. staggered and angular) can be realized without changing the technological process flow but by design modifications, only. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4 mm mirror diameter and ±7.5° mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Denis Jung, Thilo Sandner, David Kallweit, and Harald Schenk "Vertical comb drive microscanners for beam steering, linear scanning, and laser projection applications", Proc. SPIE 8252, MOEMS and Miniaturized Systems XI, 82520U (15 February 2012); https://doi.org/10.1117/12.906690
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