15 February 2012 MEMS deformable mirror actuators with enhanced reliability
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Proceedings Volume 8253, MEMS Adaptive Optics VI; 825306 (2012) https://doi.org/10.1117/12.910742
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
MEMS deformable mirrors with thousands of actuators are under development for space-based operation, which require fault tolerant actuators that will not fail due to electrical overstress. We report on advances made in the development of MEMS deformable mirror actuators with enhanced reliability for space-based, high-contrast imaging instrumentation that eliminate irreversible actuator damage resulting from snap-through.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. A. Cornelissen, S. A. Cornelissen, T. G. Bifano, T. G. Bifano, P. A. Bierden, P. A. Bierden, } "MEMS deformable mirror actuators with enhanced reliability", Proc. SPIE 8253, MEMS Adaptive Optics VI, 825306 (15 February 2012); doi: 10.1117/12.910742; https://doi.org/10.1117/12.910742

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