Thermo-mechanical properties of a deformable mirror with screen printed actuator

C. Bruchmann; M. Appelfelder; E. Beckert; R. Eberhardt; A. Tünnermann

doi:10.1117/12.912614

15 February 2012 Thermo-mechanical properties of a deformable mirror with screen printed actuator

C. Bruchmann, M. Appelfelder, E. Beckert, R. Eberhardt, A. Tünnermann

Proceedings Volume 8253, MEMS Adaptive Optics VI; 82530D (2012) https://doi.org/10.1117/12.912614
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States

Abstract

This paper reports on the thermo-mechanical modeling and characterization of a screen printed deformable mirror. The unimorph mirror offers a ceramic LTCC substrate with screen printed PZT layers on its rear surface and a machined copper layer on its front surface. We present the thermo-mechanical model of the deformable mirror based on Ansys multiphysics. The developed mirror design is practically characterized. The homogeneous loading of the optimized design results in a membrane deformation with a rate of -0.2 μm/K, while a laser loading causes a change with a rate of 1.3 μm/W. The proposed mirror design is also suitable to pre-compensate laser generated mirror deformations by homogeneous thermal loading (heating). We experimentally show that a 35 K pre-heating of the mirror assembly could compensate an absorbed laser power of 1.25 W.

Citation Download Citation

C. Bruchmann, M. Appelfelder, E. Beckert, R. Eberhardt, and A. Tünnermann "Thermo-mechanical properties of a deformable mirror with screen printed actuator", Proc. SPIE 8253, MEMS Adaptive Optics VI, 82530D (15 February 2012); https://doi.org/10.1117/12.912614

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