15 February 2012 Thermo-mechanical properties of a deformable mirror with screen printed actuator
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Proceedings Volume 8253, MEMS Adaptive Optics VI; 82530D (2012) https://doi.org/10.1117/12.912614
Event: SPIE MOEMS-MEMS, 2012, San Francisco, California, United States
This paper reports on the thermo-mechanical modeling and characterization of a screen printed deformable mirror. The unimorph mirror offers a ceramic LTCC substrate with screen printed PZT layers on its rear surface and a machined copper layer on its front surface. We present the thermo-mechanical model of the deformable mirror based on Ansys multiphysics. The developed mirror design is practically characterized. The homogeneous loading of the optimized design results in a membrane deformation with a rate of -0.2 μm/K, while a laser loading causes a change with a rate of 1.3 μm/W. The proposed mirror design is also suitable to pre-compensate laser generated mirror deformations by homogeneous thermal loading (heating). We experimentally show that a 35 K pre-heating of the mirror assembly could compensate an absorbed laser power of 1.25 W.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
C. Bruchmann, C. Bruchmann, M. Appelfelder, M. Appelfelder, E. Beckert, E. Beckert, R. Eberhardt, R. Eberhardt, A. Tünnermann, A. Tünnermann, } "Thermo-mechanical properties of a deformable mirror with screen printed actuator", Proc. SPIE 8253, MEMS Adaptive Optics VI, 82530D (15 February 2012); doi: 10.1117/12.912614; https://doi.org/10.1117/12.912614

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