28 February 2012 Dual vertical slot modulator for millimeter wave photonics
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Proceedings Volume 8259, RF and Millimeter-Wave Photonics II; 82590D (2012); doi: 10.1117/12.914425
Event: SPIE OPTO, 2012, San Francisco, California, United States
Abstract
Modern high frequency applications necessitate the utilization of the millimeter wave band. Slot waveguides have previously been used for electro optic modulators as the enhancement of the electric field strength in the slot creates a large overlap with the electro optic material. We present a design that utilizes the field enhancement provided by a slot waveguide geometry for both the optical field and the RF modulating field. The dual RF and optical slot configuration maximizes the overlap of the optical field and the modulating field in the electro optic material, creating the maximum amount of phase change per applied volt of modulating signal. This design presents unique fabrication challenges.
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Stephen T. Kozacik, David L. K. Eng, Mathew J. Zablocki, Michael Roman, Ahmed Sharkawy, Janusz Murakowski, Benjamin C. Olbricht, Shouyuan Shi, Dennis W. Prather, "Dual vertical slot modulator for millimeter wave photonics", Proc. SPIE 8259, RF and Millimeter-Wave Photonics II, 82590D (28 February 2012); doi: 10.1117/12.914425; https://doi.org/10.1117/12.914425
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KEYWORDS
Waveguides

Electro optics

Modulation

Titanium dioxide

Electron beam lithography

Silicon

Modulators

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