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In this paper we show the application of Rutherford backscattering spectrometry and ion channeling
(RBS/C) for the detection of compositional and strain gradients in CdZnO grown almost
pseudomorphically on MgZnO. The asymmetric features revealed in X-ray diffraction studies were
explained by the compositional gradient found in the first 100 nm close to the interface. Calculations of
the effect of such a gradient on the strain state of the layer were developed and contrasted with RBS/C
angular scans. Additionally, the substitutional behavior of Cd (and Mg) in Zn-sites was demonstrated.
A. Redondo-Cubero,M. Brandt,F. Henneberger,E. Alves, andK. Lorenz
"Ion beams as a tool for the characterization of near-pseudomorphic CdZnO epilayers", Proc. SPIE 8263, Oxide-based Materials and Devices III, 82630U (1 March 2012); https://doi.org/10.1117/12.908496
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A. Redondo-Cubero, M. Brandt, F. Henneberger, E. Alves, K. Lorenz, "Ion beams as a tool for the characterization of near-pseudomorphic CdZnO epilayers," Proc. SPIE 8263, Oxide-based Materials and Devices III, 82630U (1 March 2012); https://doi.org/10.1117/12.908496