1 February 2012 Polymer waveguides based on silicon optical benches
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Abstract
In this paper, the proposed polymer waveguides based on silicon optical bench (SiOB) including a Si-based 45° microreflector and multi-channel polymer waveguides at cross-sectional dimension of 40 × 20 μm2 is demonstrated. The proposed 45° micro-reflector is fabricated on an orientation-defined (100) silicon substrate by using the anisotropic wetetching process. The optical performance of polymer waveguides with the propagation loss of -0.35 dB/cm and the insertion loss of -2.5 dB for the SiOB-based bending structure with polymer waveguides has been experimented. The multi-channels polymer waveguides based on the SiOB would be applied for the chip-to-chip optical interconnect.
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Chin T. Chen, Po K. Shen, Chia C. Chang, Jen Y. Li, Hsu L. Hsiao, Yun C. Lee, Mount L. Wu, "Polymer waveguides based on silicon optical benches", Proc. SPIE 8264, Integrated Optics: Devices, Materials, and Technologies XVI, 82640G (1 February 2012); doi: 10.1117/12.908580; https://doi.org/10.1117/12.908580
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