Loss reduction of silicon slot waveguides with ALD grown thin films

A. Säynätjoki; L. Karvonen; T. Alasaarela; D. Korn; L. Alloatti; A. Tervonen; R. Palmer; C. Koos; J. Leuthold; W. Freude; S. Honkanen

doi:10.1117/12.908640

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2 February 2012 Loss reduction of silicon slot waveguides with ALD grown thin films

A. Säynätjoki, L. Karvonen, T. Alasaarela, D. Korn, L. Alloatti, A. Tervonen, R. Palmer, C. Koos, J. Leuthold, W. Freude, S. Honkanen

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Proceedings Volume 8266, Silicon Photonics VII; 82660D (2012) https://doi.org/10.1117/12.908640
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

We present our studies on slot waveguides clad with atomic layer deposition (ALD). We show reduction of propagation loss in silicon slot waveguides. With an ALD grown titania thin film cladding, propagation loss as low as 7 dB/cm for a deep-UV patterned slot waveguide is achieved.

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A. Säynätjoki, L. Karvonen, T. Alasaarela, D. Korn, L. Alloatti, A. Tervonen, R. Palmer, C. Koos, J. Leuthold, W. Freude, and S. Honkanen "Loss reduction of silicon slot waveguides with ALD grown thin films", Proc. SPIE 8266, Silicon Photonics VII, 82660D (2 February 2012); https://doi.org/10.1117/12.908640

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