Compact and efficient couplers for silicon slot waveguides

A. Säynätjoki; L. Karvonen; X. Tu; T. Y. Liow; A. Tervonen; G. Q. Lo; S. Honkanen

doi:10.1117/12.908742

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2 February 2012 Compact and efficient couplers for silicon slot waveguides

A. Säynätjoki, L. Karvonen, X. Tu, T. Y. Liow, A. Tervonen, G. Q. Lo, S. Honkanen

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Proceedings Volume 8266, Silicon Photonics VII; 82660J (2012) https://doi.org/10.1117/12.908742
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

Different types of slot waveguide couplers are studied theoretically and experimentally. We present strip-to-slot waveguide couplers with a length as small as 10 μm and with their feature sizes no less than 150 nm, exhibiting efficient coupling into the slot mode and negligible scattering. We demonstrate coupling loss of 0.11 dB for a 20-micron long coupler from a strip waveguide to slot waveguide, fabricated using the 248 nm deep-UV lithography. We also discuss ring resonator couplers, multimode multislot structures for 2x2 couplers, and prism coupling characterization of multislot waveguide structures.

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A. Säynätjoki, L. Karvonen, X. Tu, T. Y. Liow, A. Tervonen, G. Q. Lo, and S. Honkanen "Compact and efficient couplers for silicon slot waveguides", Proc. SPIE 8266, Silicon Photonics VII, 82660J (2 February 2012); https://doi.org/10.1117/12.908742

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