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2 February 2012Compact and efficient couplers for silicon slot waveguides
Different types of slot waveguide couplers are studied theoretically and experimentally. We present strip-to-slot
waveguide couplers with a length as small as 10 μm and with their feature sizes no less than 150 nm, exhibiting efficient
coupling into the slot mode and negligible scattering. We demonstrate coupling loss of 0.11 dB for a 20-micron long
coupler from a strip waveguide to slot waveguide, fabricated using the 248 nm deep-UV lithography. We also discuss
ring resonator couplers, multimode multislot structures for 2x2 couplers, and prism coupling characterization of multislot
waveguide structures.
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A. Säynätjoki, L. Karvonen, X. Tu, T. Y. Liow, A. Tervonen, G. Q. Lo, S. Honkanen, "Compact and efficient couplers for silicon slot waveguides," Proc. SPIE 8266, Silicon Photonics VII, 82660J (2 February 2012); https://doi.org/10.1117/12.908742