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2 February 2012SOI-based trapezoidal waveguide with 45-degree microreflector for non-coplanar light bending
SOI-based trapezoidal waveguide with 45° reflector for non-coplanar light bending is proposed and demonstrated. The
proposed structures include 45° micro-reflector and silicon trapezoidal waveguide. Due to the SOI-based trapezoidal
waveguide with 45° reflector, light wave can be coupled into silicon waveguide easily and have higher coupling
efficiency. All of structures are fabricated using a single-step wet etching process. The RMS roughness of waveguide
sidewall and 45° micro-reflector is about 30 nm. The coupling efficiency of proposed structure is -4.51 dB, and
misalignment tolerance are 42 μm at horizontal direction and 41 μm at vertical direction. The multi-channel trapezoidal
waveguide is also demonstrated. This device can transfer the light wave at the same time, and its cross talk is about -50
dB.