SOI-based trapezoidal waveguide with 45-degree microreflector for non-coplanar light bending

Po-Kuan Shen; Chia-Chi Chang; Chin-Ta Chen; Hsu-Liang Hsiao; Yun-Chih Lee; Mount-Learn Wu

doi:10.1117/12.908734

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2 February 2012 SOI-based trapezoidal waveguide with 45-degree microreflector for non-coplanar light bending

Po-Kuan Shen; Chia-Chi Chang; Chin-Ta Chen; Hsu-Liang Hsiao; Yun-Chih Lee; Mount-Learn Wu

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Proceedings Volume 8266, Silicon Photonics VII; 82660K (2012) https://doi.org/10.1117/12.908734
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

SOI-based trapezoidal waveguide with 45° reflector for non-coplanar light bending is proposed and demonstrated. The proposed structures include 45° micro-reflector and silicon trapezoidal waveguide. Due to the SOI-based trapezoidal waveguide with 45° reflector, light wave can be coupled into silicon waveguide easily and have higher coupling efficiency. All of structures are fabricated using a single-step wet etching process. The RMS roughness of waveguide sidewall and 45° micro-reflector is about 30 nm. The coupling efficiency of proposed structure is -4.51 dB, and misalignment tolerance are 42 μm at horizontal direction and 41 μm at vertical direction. The multi-channel trapezoidal waveguide is also demonstrated. This device can transfer the light wave at the same time, and its cross talk is about -50 dB.

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Po-Kuan Shen, Chia-Chi Chang, Chin-Ta Chen, Hsu-Liang Hsiao, Yun-Chih Lee, and Mount-Learn Wu "SOI-based trapezoidal waveguide with 45-degree microreflector for non-coplanar light bending", Proc. SPIE 8266, Silicon Photonics VII, 82660K (2 February 2012); https://doi.org/10.1117/12.908734

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