Phononic crystal strips for engineering micromechanical resonators

Jin-Chen Hsu; Feng-Chia Hsu; Pin Chang

doi:10.1117/12.916536

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22 February 2012 Phononic crystal strips for engineering micromechanical resonators

Jin-Chen Hsu, Feng-Chia Hsu, Pin Chang

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Proceedings Volume 8269, Photonic and Phononic Properties of Engineered Nanostructures II; 826912 (2012) https://doi.org/10.1117/12.916536
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

In micromechanical resonators, energy loss via anchors into the substrates decreases quality factors. To eliminate the anchor loss, a phononic band-gap structure is proposed and employed. In this paper, we investigate the elastic wave propagation in phononic crystal strips, cut from a silicon phononic crystal slab consisting of square-lattice vacuum holes, by analyzing the dispersion relations, acoustic eignemodes, and transmission properties. The phononic crystal strips are applied to devise the anchor-loss free micromechanical resonators and enhance resonator performances. The phononic crystal strips are found to have frequency forbidden bands and are introduced to eliminate the anchor loss in the bar-type and ring-type resonators. Numerical analysis shows that the phononic crystal strips can effectively suppress the acoustic energy leak and increase the stored energy inside the resonators. Realization of a high quality factor micromechanical resonator with minimized anchor loss is expected.

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Jin-Chen Hsu, Feng-Chia Hsu, and Pin Chang "Phononic crystal strips for engineering micromechanical resonators", Proc. SPIE 8269, Photonic and Phononic Properties of Engineered Nanostructures II, 826912 (22 February 2012); https://doi.org/10.1117/12.916536

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