Slow-light high contrast metastructure hollow-core waveguides

Weimin Zhou; Gerard Dang; Monica Taysing-Lara; Vadim Karagodsky; Tianbo Sun; Connie Chang-Hasnain

doi:10.1117/12.908840

16 February 2012 Slow-light high contrast metastructure hollow-core waveguides

Weimin Zhou, Gerard Dang, Monica Taysing-Lara, Vadim Karagodsky, Tianbo Sun, Connie Chang-Hasnain

Proceedings Volume 8270, High Contrast Metastructures; 827009 (2012) https://doi.org/10.1117/12.908840
Event: SPIE OPTO, 2012, San Francisco, California, United States

Abstract

We present a new type of Si-based, metastructure, hollow-core waveguide that has highly desirable "slow-light" and low-loss properties for providing time-delays or high-Q cavities in chip-scale integrated OE circuits. This waveguide has high contrast grating (HCG) metastructures as the 4 claddings/walls of a squared hollow-core structure. We have successfully fabricated this 3-D metastructure waveguide using a new nano-fabrication techniques including one selfaligned, cycled, modified Bosch etch process. Our computational modeling indicates that there is a slow-light region with very little propagation loss. We will report our preliminary experimental waveguide test results for propagation loss and group velocity.

Citation Download Citation

Weimin Zhou, Gerard Dang, Monica Taysing-Lara, Vadim Karagodsky, Tianbo Sun, and Connie Chang-Hasnain "Slow-light high contrast metastructure hollow-core waveguides", Proc. SPIE 8270, High Contrast Metastructures, 827009 (16 February 2012); https://doi.org/10.1117/12.908840

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