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16 February 2012 Slow-light high contrast metastructure hollow-core waveguides
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Proceedings Volume 8270, High Contrast Metastructures; 827009 (2012) https://doi.org/10.1117/12.908840
Event: SPIE OPTO, 2012, San Francisco, California, United States
Abstract
We present a new type of Si-based, metastructure, hollow-core waveguide that has highly desirable "slow-light" and low-loss properties for providing time-delays or high-Q cavities in chip-scale integrated OE circuits. This waveguide has high contrast grating (HCG) metastructures as the 4 claddings/walls of a squared hollow-core structure. We have successfully fabricated this 3-D metastructure waveguide using a new nano-fabrication techniques including one selfaligned, cycled, modified Bosch etch process. Our computational modeling indicates that there is a slow-light region with very little propagation loss. We will report our preliminary experimental waveguide test results for propagation loss and group velocity.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Weimin Zhou, Gerard Dang, Monica Taysing-Lara, Vadim Karagodsky, Tianbo Sun, and Connie Chang-Hasnain "Slow-light high contrast metastructure hollow-core waveguides", Proc. SPIE 8270, High Contrast Metastructures, 827009 (16 February 2012); https://doi.org/10.1117/12.908840
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