23 February 2012 Diffractive optical elements based on subwavelength high-contrast gratings
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Proceedings Volume 8270, High Contrast Metastructures; 82700P (2012) https://doi.org/10.1117/12.908145
Event: SPIE OPTO, 2012, San Francisco, California, United States
We report on novel concepts for reflective diffractive elements based on high-contrast gratings. To demonstrate the possibilities for such devices reflective cavity couplers with three output ports are investigated. A diffracting period is superposed to a highly reflective subwavelength grating in order to realize diffractive elements. This superposition can be realized with a periodic depth, fill factor or period modulation of the reflector. Further, to limit the total transmission of the device it is necessary to enhance its angular tolerance. We discuss different approaches in order to realize this increased reflectivity in broad range of the angular spectrum. The contribution focuses on the material combination silicon-silica, but the presented concepts also hold for other material combinations with large index contrast and even for monolithic silicon structures.
© (2012) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Stefanie Kroker, Stefanie Kroker, Thomas Käsebier, Thomas Käsebier, Thomas Weber, Thomas Weber, Stefan Steiner, Stefan Steiner, Frank Fuchs, Frank Fuchs, Ernst-Bernhard Kley, Ernst-Bernhard Kley, Andreas Tünnermann, Andreas Tünnermann, } "Diffractive optical elements based on subwavelength high-contrast gratings", Proc. SPIE 8270, High Contrast Metastructures, 82700P (23 February 2012); doi: 10.1117/12.908145; https://doi.org/10.1117/12.908145

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