23 February 2012 Evolution of micro-spikes on silicon surface etched by femtosecond laser with different fabrication conditions
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Abstract
We fabricated micro-spikes on the surface of silicon by using femtosecond laser pulses. By changing the fabrication condition, i.e., the power of laser, the number of laser pulses, the wavelength of laser, and the proportional relation between laser power and pulse number under the same laser fluence, we found many interesting phenomena, which proved there was a special relation between laser parameters and the surface morphology. All these results are important for the optimal fabrication of surface-microstructured photovoltaic material with high absorptance and good photoelectric properties, for the practical applications of solar cell, et al.
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Y. Peng, Y. Peng, Y. M. Zhu, Y. M. Zhu, } "Evolution of micro-spikes on silicon surface etched by femtosecond laser with different fabrication conditions", Proc. SPIE 8271, Quantum Dots and Nanostructures: Synthesis, Characterization, and Modeling IX, 82710I (23 February 2012); doi: 10.1117/12.915537; https://doi.org/10.1117/12.915537
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