7 February 2012 Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning
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We present surface micro-machined tunable vertical-cavity surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed surface micro-machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.
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Christian Gierl, Christian Gierl, Tobias Gründl, Tobias Gründl, Pierluigi Debernardi, Pierluigi Debernardi, Karolina Zogal, Karolina Zogal, Hooman A. Davani, Hooman A. Davani, Christian Grasse, Christian Grasse, Gerhard Böhm, Gerhard Böhm, Peter Meissner, Peter Meissner, Franko Küppers, Franko Küppers, Markus-Christian Amann, Markus-Christian Amann, } "Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning", Proc. SPIE 8276, Vertical-Cavity Surface-Emitting Lasers XVI, 82760P (7 February 2012); doi: 10.1117/12.907800; https://doi.org/10.1117/12.907800

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