7 February 2012 VCSEL beam control with collective and self-aligned polymer technologies
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We present recent results on the integration of polymer microlenses on single mode Vertical-Cavity Surface-Emitting Lasers (VCSELs) to achieve output beam control. We describe in particular low cost and collective fabrication methods developed to allow for a self-alignment of the lens with the laser source. These approaches are based either on surface tension effects or on a self-writing process using novel Near Infra-Red (NIR) photopolymers. Results on beam collimation at 850nm are presented and compared to a fully vectorial and three-dimensional optical model that takes into account the complete geometry of laser resonator is used. Results on short distance focusing using self-aligned microtips are presented. Considerations to achieve an active beam control by means of polymer-based MEMS (Micro-electro-mechanical System) are also discussed. Potential applications may concern the improvement of VCSEL insertion in optical interconnects or sensing systems, as well as the fabrication of optical micro-probes for near-field microscopy.
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Véronique Bardinal, Véronique Bardinal, Thierry Camps, Thierry Camps, Benjamin Reig, Benjamin Reig, Pierluigi Debernardi, Pierluigi Debernardi, Olivier Soppera, Olivier Soppera, David Barat, David Barat, Jean-Baptiste Doucet, Jean-Baptiste Doucet, Emmanuelle Daran, Emmanuelle Daran, } "VCSEL beam control with collective and self-aligned polymer technologies", Proc. SPIE 8276, Vertical-Cavity Surface-Emitting Lasers XVI, 82760U (7 February 2012); doi: 10.1117/12.910719; https://doi.org/10.1117/12.910719

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