Interferometry On Grazing Incidence Optics

Joseph Geary; Riki Maeda

doi:10.1117/12.942191

9 August 1988 Interferometry On Grazing Incidence Optics

Joseph Geary, Riki Maeda

Proceedings Volume 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications; (1988) https://doi.org/10.1117/12.942191
Event: 31st Annual Technical Symposium on Optical and Optoelectronic Applied Sciences and Engineering, 1987, San Diego, CA, United States

Abstract

A preliminary interferometric procedure is described showing potential for obtaining surface figure error maps of grazing incidence optics at normal incidence. The latter are found in some laser resonator configurations, and in Wolter type X-ray optics. The procedure makes use of cylindrical wavefronts and error subtraction techniques over subapertures. The surface error maps obtained will provide critical information to opticians in the fabrication process.

Citation Download Citation

Joseph Geary and Riki Maeda "Interferometry On Grazing Incidence Optics", Proc. SPIE 0830, Grazing Incidence Optics for Astronomical and Laboratory Applications, (9 August 1988); https://doi.org/10.1117/12.942191

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