Novel silicon-on-insulator grating couplers based on CMOS poly-silicon gate layer

Chao Qiu; Zhen Sheng; Le Li; Albert Pang; Aimin Wu; Junjie Du; Jing Chen; Xi Wang; Fuwan Gan; Shichang Zou

doi:10.1117/12.904183

28 November 2011 Novel silicon-on-insulator grating couplers based on CMOS poly-silicon gate layer

Chao Qiu, Zhen Sheng, Le Li, Albert Pang, Aimin Wu, Junjie Du, Jing Chen, Xi Wang, Fuwan Gan, Shichang Zou

Proceedings Volume 8308, Optoelectronic Materials and Devices VI; 83081G (2011) https://doi.org/10.1117/12.904183
Event: SPIE/OSA/IEEE Asia Communications and Photonics, 2011, Shanghai, China

Abstract

Grating couplers are widely investigated as a coupling interface between silicon-on-insulator waveguides and optical fibers. In this work, novel grating couplers based on strip poly-Si are proposed. This structure utilizes the poly-Si gate layer of the CMOS MOSFETs, and thus enables grating couplers integrated with CMOS circuits without adding any additional masks and process steps. Simulation results show that a coupling efficiency over 60% can be achieved between silicon-on-insulator waveguides and fibers.

Citation Download Citation

Chao Qiu, Zhen Sheng, Le Li, Albert Pang, Aimin Wu, Junjie Du, Jing Chen, Xi Wang, Fuwan Gan, and Shichang Zou "Novel silicon-on-insulator grating couplers based on CMOS poly-silicon gate layer", Proc. SPIE 8308, Optoelectronic Materials and Devices VI, 83081G (28 November 2011); https://doi.org/10.1117/12.904183

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available