Fabrication of fiber-optic EFPI with double-layer SU-8 diaphragm

Ding Ding; Na Chen; Qiang Guo; Zhenyi Chen; Shupeng Liu; Fufei Pang; Tingyun Wang

doi:10.1117/12.905510

29 November 2011 Fabrication of fiber-optic EFPI with double-layer SU-8 diaphragm

Ding Ding, Na Chen, Qiang Guo, Zhenyi Chen, Shupeng Liu, Fufei Pang, Tingyun Wang

Proceedings Volume 8311, Optical Sensors and Biophotonics III; 83112I (2011) https://doi.org/10.1117/12.905510
Event: SPIE/OSA/IEEE Asia Communications and Photonics, 2011, Shanghai, China

Abstract

In this paper, we fabricated fiber-optic extrinsic Fabry-Perot interferometric (EFPI) sensors with photolithography . The sensor has double-layer SU-8 diaphragm: one is the pressure transduction layer; the other is cavity control layer. Since SU-8 material has a low Young's modulus, high pressure sensitivity can be achieved with SU-8 diaphragm. The EFPI were formed by a single mode fiber and a double-layer SU-8 diaphragm. To improve the fringe contrast, gold mirrors with a reflectivity of 50% were evaporated onto the end face of the single mode fiber and the inner face of the SU-8 diaphragm respectively. Experiments were done to estimate the performance of the sensor for static pressure measurement. The results show that an expected cavity length of the sensor was obtained and the EFPI sensor has a good linearity from 100 to 2500 Pa with 100 Pa resolution and a sensitivity of 154.8 nm/kPa.

Citation Download Citation

Ding Ding, Na Chen, Qiang Guo, Zhenyi Chen, Shupeng Liu, Fufei Pang, and Tingyun Wang "Fabrication of fiber-optic EFPI with double-layer SU-8 diaphragm", Proc. SPIE 8311, Optical Sensors and Biophotonics III, 83112I (29 November 2011); https://doi.org/10.1117/12.905510

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