29 November 2011 Fabrication of fiber-optic EFPI with double-layer SU-8 diaphragm
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Proceedings Volume 8311, Optical Sensors and Biophotonics III; 83112I (2011) https://doi.org/10.1117/12.905510
Event: SPIE/OSA/IEEE Asia Communications and Photonics, 2011, Shanghai, China
In this paper, we fabricated fiber-optic extrinsic Fabry-Perot interferometric (EFPI) sensors with photolithography . The sensor has double-layer SU-8 diaphragm: one is the pressure transduction layer; the other is cavity control layer. Since SU-8 material has a low Young's modulus, high pressure sensitivity can be achieved with SU-8 diaphragm. The EFPI were formed by a single mode fiber and a double-layer SU-8 diaphragm. To improve the fringe contrast, gold mirrors with a reflectivity of 50% were evaporated onto the end face of the single mode fiber and the inner face of the SU-8 diaphragm respectively. Experiments were done to estimate the performance of the sensor for static pressure measurement. The results show that an expected cavity length of the sensor was obtained and the EFPI sensor has a good linearity from 100 to 2500 Pa with 100 Pa resolution and a sensitivity of 154.8 nm/kPa.
© (2011) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Ding Ding, Ding Ding, Na Chen, Na Chen, Qiang Guo, Qiang Guo, Zhenyi Chen, Zhenyi Chen, Shupeng Liu, Shupeng Liu, Fufei Pang, Fufei Pang, Tingyun Wang, Tingyun Wang, } "Fabrication of fiber-optic EFPI with double-layer SU-8 diaphragm", Proc. SPIE 8311, Optical Sensors and Biophotonics III, 83112I (29 November 2011); doi: 10.1117/12.905510; https://doi.org/10.1117/12.905510

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