15 November 2011 Error compensation for the linear error of a universal tool microscope’s scale system
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Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83210D (2011) https://doi.org/10.1117/12.903708
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China
Abstract
The method of 1x asymmetry optical paths generating magnification error is employed in scale system linear error compensation of universal tool microscope’s longitudinal coordinate.The micro-displacements of scale iamges are achieved for compensation of scale linear error based on the property of off-axis and out of focus and focal length inequality. The creative and ingenious optical paths design is discribed in the paper . A detailed analysis of the principle of error compensation is presented. Magnification error principle formula and defocus amount and off-axis aberration error extension formula are also derived. The relationship between the calibration result and slope of formula is obtained to benefit the analysis and application on-site.The influence caused by the change of magnification parameters also are discussed in the paper. Indication error of one-meter longitudinal coordinate can be achieved less than 2.5 um after compensation in using this method.
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Xiaofei Wang, Zurong Qiu, Jiaxing Guo, Bopei Yang, "Error compensation for the linear error of a universal tool microscope’s scale system", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210D (15 November 2011); doi: 10.1117/12.903708; https://doi.org/10.1117/12.903708
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