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15 November 2011Error compensation for the linear error of a universal tool microscope’s scale system
The method of 1x asymmetry optical paths generating magnification error is employed in scale system
linear error compensation of universal tool microscope’s longitudinal coordinate.The
micro-displacements of scale iamges are achieved for compensation of scale linear error based on the
property of off-axis and out of focus and focal length inequality. The creative and ingenious optical
paths design is discribed in the paper . A detailed analysis of the principle of error compensation is
presented. Magnification error principle formula and defocus amount and off-axis aberration error
extension formula are also derived. The relationship between the calibration result and slope of formula
is obtained to benefit the analysis and application on-site.The influence caused by the change of
magnification parameters also are discussed in the paper. Indication error of one-meter longitudinal
coordinate can be achieved less than 2.5 um after compensation in using this method.
Xiaofei Wang,Zurong Qiu,Jiaxing Guo, andBopei Yang
"Error compensation for the linear error of a universal tool microscope’s scale system", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210D (15 November 2011); https://doi.org/10.1117/12.903708
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Xiaofei Wang, Zurong Qiu, Jiaxing Guo, Bopei Yang, "Error compensation for the linear error of a universal tool microscope’s scale system," Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210D (15 November 2011); https://doi.org/10.1117/12.903708