Micro-vision-based displacement measurement with high accuracy

Qinghua Lu; Xianmin Zhang; Yanbin Fan

doi:10.1117/12.903720

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15 November 2011 Micro-vision-based displacement measurement with high accuracy

Qinghua Lu, Xianmin Zhang, Yanbin Fan

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Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83210I (2011) https://doi.org/10.1117/12.903720
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

The micro-motion stages are widely used in micro/nano manufacturing technology. In this paper, an integrated approach for measuring micro-displacement of micro-motion stage that incorporates motion estimation algorithm into the computer microvision is proposed. At first, the basic principle of the computer microvision measurement is analyzed. Then, a robust multiscale motion estimation algorithm for micro-motion measurement is proposed. Finally, the microdisplacement of the micro-motion stage based on the piezoelectric ceramic actuators and the compliant mechanisms is measured using the integrated approach. The maximal bias of the proposed approach reached 13 nm. Experimental results show that the new integrated method can measure micro-displacement with nanometer accuracy.

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Qinghua Lu, Xianmin Zhang, and Yanbin Fan "Micro-vision-based displacement measurement with high accuracy", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210I (15 November 2011); https://doi.org/10.1117/12.903720

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