The machining precision analysis of the ion beam figuring system

Tingwen Xing; Yun Li; Xin Jia; Jiajun Xu

doi:10.1117/12.903773

15 November 2011 The machining precision analysis of the ion beam figuring system

Tingwen Xing, Yun Li, Xin Jia, Jiajun Xu

Author Affiliations +

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83210N (2011) https://doi.org/10.1117/12.903773
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

The ion beam figuring machine is a kind of high precise machining facility for optical components. In the field of optical fabrication, the machining precision is always an important capability for the machining facility. The basic structures and working principles of the ion beam figuring system are primarily introduced. And then, various errors which may reduce the final machining precision have been analyzed through theories analysis and computer simulations. The errors include: the approximate error from the discrete compute model to the actual continuum machining model; the system error and random error of the high precision 3-axis motion stage which drives the ion source; the system error and random error of the material removal rate of the ion source. A set of potential error parameters has been given for each part of the ion beam figuring system. By using this set of parameters, it is possible to reach the nano-level machining. The precision analysis in the paper will be a reference for ion beam figuring.

Citation Download Citation

Tingwen Xing, Tingwen Xing, Yun Li, Yun Li, Xin Jia, Xin Jia, Jiajun Xu, Jiajun Xu, "The machining precision analysis of the ion beam figuring system", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83210N (15 November 2011); doi: 10.1117/12.903773; https://doi.org/10.1117/12.903773

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