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15 November 2011A 3D nano driving system with large-stroke
To satisfy the need of precision displacement, a 3D Nano driving system, which including metrological vertical scanning
system and coplanar 2D precision stage with large-stroke and nanopositioning resolution, is developed in this paper. The
coarse-fine dual-stage actuators have been applied in the 3D Nano driving system in X, Y and Z directions. The
servomotors combining with precision lead screws and linear guides are used to actuate the coarse driving, and
piezoelectric actuators combining with parallel board flexure hinges are used to actuate the fine driving. Three laser
interferometers are used to measure the displacement in X, Y and Z directions respectively. The structure and principle
of the system is introduced and the displacement range and displacement resolution of the system are also analyzed in
details. The 3D Nano driving system has been successfully applied in the white light interference based atomic force
probe scanning measurement system for ultra-precision surface topography developed in our laboratory. The
experimental results show that the nano-driving in X, Y, Z directions can be realized by the 3D Nano driving system.
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Shuzhen Wang, Ziqiang Du, Tiebang Xie, "A 3D nano driving system with large-stroke," Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832112 (15 November 2011); https://doi.org/10.1117/12.903972