A 3D nano driving system with large-stroke

Shuzhen Wang; Ziqiang Du; Tiebang Xie

doi:10.1117/12.903972

15 November 2011 A 3D nano driving system with large-stroke

Shuzhen Wang, Ziqiang Du, Tiebang Xie

Author Affiliations +

Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 832112 (2011) https://doi.org/10.1117/12.903972
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

To satisfy the need of precision displacement, a 3D Nano driving system, which including metrological vertical scanning system and coplanar 2D precision stage with large-stroke and nanopositioning resolution, is developed in this paper. The coarse-fine dual-stage actuators have been applied in the 3D Nano driving system in X, Y and Z directions. The servomotors combining with precision lead screws and linear guides are used to actuate the coarse driving, and piezoelectric actuators combining with parallel board flexure hinges are used to actuate the fine driving. Three laser interferometers are used to measure the displacement in X, Y and Z directions respectively. The structure and principle of the system is introduced and the displacement range and displacement resolution of the system are also analyzed in details. The 3D Nano driving system has been successfully applied in the white light interference based atomic force probe scanning measurement system for ultra-precision surface topography developed in our laboratory. The experimental results show that the nano-driving in X, Y, Z directions can be realized by the 3D Nano driving system.

Citation Download Citation

Shuzhen Wang, Shuzhen Wang, Ziqiang Du, Ziqiang Du, Tiebang Xie, Tiebang Xie, "A 3D nano driving system with large-stroke", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832112 (15 November 2011); doi: 10.1117/12.903972; https://doi.org/10.1117/12.903972

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