15 November 2011 High precision measurement system based on coplanar XY-stage
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Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 832119 (2011) https://doi.org/10.1117/12.904072
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China
Abstract
A coplanar XY-stage, together with a high precise measurement system, is presented in this paper. The proposed coplanar XY-stage fully conforms to the Abbe principle. The symmetric structural design is considered to eliminate the structure deformation due to force and temperature changes. For consisting of a high precise measurement system, a linear diffraction grating interferometer(LDGI) is employed as the position feedback sensor with the resolution to 1 nm after the waveform interpolation, an ultrasonic motor HR4 is used to generate both the long stroke motion and the nano positioning on the same stage. Three modes of HR4 are used for positioning control: the AC mode in continuous motion control for the long stroke; the gate mode to drive the motor in low velocity for the short stroke; and the DC mode in which the motor works as a piezo actuator, enabling accurate positioning of a few nanometers. The stage calibration is carried out by comparing the readings of LDGI with a Renishaw laser interferometer and repeated 5 times. Experimental results show the XY-stage has achieved positioning accuracy in less than 20nm after the compensation of systematic errors, and standard deviation is within 20 nm for travels up to 20 mm.
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Kuang-Chao Fan, Jin-Wei Miao, Wei Gong, You-Liang Zhang, Fang Cheng, "High precision measurement system based on coplanar XY-stage", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 832119 (15 November 2011); doi: 10.1117/12.904072; https://doi.org/10.1117/12.904072
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