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15 November 2011Design for H type co-planar precision stage based on closed air bearing guideway with vacuum attraction force
The accuracy of traditional two-dimensional precision stage is limited not only by the accuracy of each guideway but
also by the configuration of the stage. It is not easy to calculate and compensate the total accuracy of the stage due to the
complicated influence caused by the different position of the slides. An air bearing guideways with vacuum attraction
forces has been designed with closed slide structure to enhance the stiffness and avoid the deformation caused by the
weight of slide and workpieces. An H style two-dimension ultra-precision stage with co-planar structure has been
developed based on the air bearing guideways to avoid the multi-influence by the axes. Driven by linear motors, the
position of the workpiece is encoded by length scales with resolution of 50nm and thermal expansion of 0.6 μm/m/°C (0
°C to 30 °C). The travel span of the stage is 320x320mm, during which each axis has a positioning accuracy of ±1μm, a
repeatability of ±0.3μm and a straightness of ±0.5μm. The stage can be applied in precision manufacturing and
measurement.
Bin Zhang,Zhaoyao Shi,Jiachun Lin, andHua Zhang
"Design for H type co-planar precision stage based on closed air bearing guideway with vacuum attraction force", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83211B (15 November 2011); https://doi.org/10.1117/12.904077
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Bin Zhang, Zhaoyao Shi, Jiachun Lin, Hua Zhang, "Design for H type co-planar precision stage based on closed air bearing guideway with vacuum attraction force," Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83211B (15 November 2011); https://doi.org/10.1117/12.904077