Design for H type co-planar precision stage based on closed air bearing guideway with vacuum attraction force

Bin Zhang; Zhaoyao Shi; Jiachun Lin; Hua Zhang

doi:10.1117/12.904077

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15 November 2011 Design for H type co-planar precision stage based on closed air bearing guideway with vacuum attraction force

Bin Zhang, Zhaoyao Shi, Jiachun Lin, Hua Zhang

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Proceedings Volume 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation; 83211B (2011) https://doi.org/10.1117/12.904077
Event: Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 2011, Yunnan, China

Abstract

The accuracy of traditional two-dimensional precision stage is limited not only by the accuracy of each guideway but also by the configuration of the stage. It is not easy to calculate and compensate the total accuracy of the stage due to the complicated influence caused by the different position of the slides. An air bearing guideways with vacuum attraction forces has been designed with closed slide structure to enhance the stiffness and avoid the deformation caused by the weight of slide and workpieces. An H style two-dimension ultra-precision stage with co-planar structure has been developed based on the air bearing guideways to avoid the multi-influence by the axes. Driven by linear motors, the position of the workpiece is encoded by length scales with resolution of 50nm and thermal expansion of 0.6 μm/m/°C (0 °C to 30 °C). The travel span of the stage is 320x320mm, during which each axis has a positioning accuracy of ±1μm, a repeatability of ±0.3μm and a straightness of ±0.5μm. The stage can be applied in precision manufacturing and measurement.

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Bin Zhang, Zhaoyao Shi, Jiachun Lin, and Hua Zhang "Design for H type co-planar precision stage based on closed air bearing guideway with vacuum attraction force", Proc. SPIE 8321, Seventh International Symposium on Precision Engineering Measurements and Instrumentation, 83211B (15 November 2011); https://doi.org/10.1117/12.904077

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